Determination of the oxygen content in amorphous SiOx thin films

The bonding structure and composition of amorphous silicon suboxide (a-SiOx, 0.25 

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Bibliographic Details
Published in:Journal of non-crystalline solids 2019-08, Vol.518, p.43-50
Main Authors: Zamchiy, A.O., Baranov, E.A., Merkulova, I.E., Khmel, S.Ya, Maximovskiy, E.A.
Format: Article
Language:English
Subjects:
Fourier transform infrared spectroscopy
Oxygen concentration
Rutherford backscattering spectroscopy
Silicon suboxide
Stoichiometric coefficient
Wavelength dispersive X-ray spectroscopy
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Description
Summary:The bonding structure and composition of amorphous silicon suboxide (a-SiOx, 0.25 
ISSN:0022-3093
1873-4812
DOI:10.1016/j.jnoncrysol.2019.05.015