Efficient diffractive optical elements in chalcogenide glass layers fabricated by direct DUV laser writing

Direct laser writing with high power densities at a wavelength of 244 nm is applied to the patterning of surface relief diffractive optical elements (DOEs) with submicron features in thin chalcogenide layers of different compositions. The topology of created features in dependence on exposure condit...

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Bibliographic Details
Published in:The Journal of physics and chemistry of solids 2007-05, Vol.68 (5), p.916-919
Main Authors: Schroeter, S., Vlček, M., Poehlmann, R., Fišerová, A.
Format: Article
Language:English
Subjects:
A. Chalcogenides
B. Vapour deposition
D. Optical properties
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Optical elements, devices, and systems
Optics
Physics
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Summary:Direct laser writing with high power densities at a wavelength of 244 nm is applied to the patterning of surface relief diffractive optical elements (DOEs) with submicron features in thin chalcogenide layers of different compositions. The topology of created features in dependence on exposure conditions is investigated. Potential and limitations of this technique for the fabrication of efficient DOEs for applications from the visible to the near infrared spectral region are discussed on the basis of examples.
ISSN:0022-3697
1879-2553
DOI:10.1016/j.jpcs.2007.01.014