Enhanced moisture-barrier property of a hybrid nanolaminate composed of aluminum oxide and plasma polymer

• Published in: Materials letters 2014-11, Vol.134, p.142-145
• Main Authors: Seo, Seung-Woo, Hwang, Kyu-Hyun, Jung, Eun, Seo, Sang Joon, Chae, Heeyeop, Cho, Sung Min
• Format: Article
• Language: English
• Subjects: Atomic layer deposition; Hybrid nanolaminate; Moisture barrier; Plasma polymer; Water vapor transmission rate
• ISSN: 0167-577X; 1873-4979
• DOI: 10.1016/j.matlet.2014.07.093

Ultra-thin aluminum-oxide layers were grown by atomic layer deposition, and plasma-polymer layers derived from an n-hexane precursor were prepared by plasma polymerization. Hybrid nanolaminates were fabricated using one-cycle-grown aluminum-oxide layers and 50nm-thick plasma polymer layers, and their moisture-barrier property was measured by an electrical calcium test. The moisture-barrier property of the hybrid nanolaminates was exponentially enhanced as the number of dyads increased, indicating that an ultra-thin single-cycle-grown aluminum oxide worked as a good moisture barrier. A 20-dyad hybrid nanolaminate composed of two-cycle-grown aluminum-oxide layers and 50nm-thick plasma-polymer layers shows a water vapor transmission rate of 1×10−3g/m2·day. [Display omitted] •We fabricate hybrid nanolaminates using ultra-thin ALD-grown aluminum-oxide layers.•A monolayer of ALD-grown aluminum oxide shows moisture-barrier performance.•Two-cycle ALD-grown aluminum oxide forms a closed and continuous layer.•Hybrid nanolaminates show exponentially better barrier property than that of each constituent.