Microfabrication and nanotechnology in manufacturing system – An overview

An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of p...

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Bibliographic Details
Main Authors: Ikumapayi, O.M., Akinlabi, E.T., Adeoye, A.O.M., Fatoba, S.O.
Format: Conference Proceeding
Language:English
Subjects:
Integrated Circuit system
Microelectromechanical system
Microfabrication
Nanotechnology
Photolithography
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Summary:An insight into nanotechnology, microfabrication, and their relevance were explored in this review. A brief history of the emancipation of nanotechnology and their various applications were documented. Microfabrication and its relevance in automobiles and medicine are scripted. A brief overview of photolithography, soft lithography, film deposition, and etching is presented. The evolution of the integrated circuit system and microelectromechanical system (MEMS) are also documented.
ISSN:2214-7853
2214-7853
DOI:10.1016/j.matpr.2020.11.233