Patterning of SiO2 nanoparticle―PMMA polymer composite microstructures based on soft lithographic techniques

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Bibliographic Details
Published in:Microelectronic engineering 2011-06, Vol.88 (6), p.939-944
Main Authors: SINGH, Akanksha, KULKARNI, Sulabha K, KHAN-MALEK, Chantal
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Integrated circuits
Materials science
Methods of nanofabrication
Nanopowders
Nanoscale materials and structures: fabrication and characterization
Physics
Self-assembly
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface treatments
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ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2010.12.026