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Transport and interface states in high-κ LaSiOx dielectric
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Published in: | Microelectronic engineering 2011-07, Vol.88 (7), p.1342-1345 |
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Main Authors: | , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2011.03.089 |