Surface plasmon resonance of centimeter-scale plasmonic crystal structures for sensor applications

• Published in: Microelectronic engineering 2012-10, Vol.98, p.436-439
• Main Authors: Lee, Dong-Jin, Yim, Hae-Dong, Lee, Seung-Gol, Beom-Hoan, O.
• Format: Article
• Language: English
• Subjects: Applied sciences; Collective excitations (including excitons, polarons, plasmons and other charge-density excitations); Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Electronics; Exact sciences and technology; Microelectronic fabrication (materials and surfaces technology); Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals; Near-field holographic (NFH) lithography; Physics; Plasmonic crystal; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Structure of solids and liquids; crystallography; Structure of specific crystalline solids; Surface and interface electron states; Surface plasmon resonance (SPR) sensor
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2012.07.031

[Display omitted] ► We fabricate the centimeter-scale plasmonic crystal structures. We fabricate the centimeter-scale plasmonic crystal structures based on periodic arrays of gold nanowells and nanobumps on glass substrates. To generate plasmonic crystal structures, we use the near-field holography system with double-exposure in which the sample was rotated by 90°. The resonant characteristics of the plasmonic crystal structures are experimentally investigated.