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Epitaxial ZrSe2/MoSe2 semiconductor v.d. Waals heterostructures on wide band gap AlN substrates
[Display omitted] •ZrSe2 films and ZrSe2/MoSe2 structures are grown by MBE on AlN/Si(111) substrates.•High quality heteroepitaxial growth is confirmed.•The band alignment of the ZrSe2/MoSe2 heterostructures is determined.•ZrSe2/MoSe2 interface shows type II band alignment configuration. Using molecu...
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Published in: | Microelectronic engineering 2015-11, Vol.147, p.269-272 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | [Display omitted]
•ZrSe2 films and ZrSe2/MoSe2 structures are grown by MBE on AlN/Si(111) substrates.•High quality heteroepitaxial growth is confirmed.•The band alignment of the ZrSe2/MoSe2 heterostructures is determined.•ZrSe2/MoSe2 interface shows type II band alignment configuration.
Using molecular beam epitaxy (MBE) of ZrSe2 and ZrSe2/MoSe2 heterostructures are grown on crystalline AlN(0001)/Si(111) substrates. Electron diffraction (RHEED) and valence band imaging by angle resolved photoelectron spectroscopy (ARPES) indicate high quality heteroepitaxial growth with very good in-plane crystallographic alignment with the substrate. The workfunction and band offsets are estimated by photoelectron spectroscopy and compared with first principles calculations. The constructed band alignments show that the heterostructure could form the basis for atomically thin p–n junction and 2D vertical tunneling devices. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2015.04.113 |