Synthesis of environment-friendly and label-free SERS probe for Iron(III) detection in integrated circuit cleaning solution waste

• Published in: Microchemical journal 2021-10, Vol.169, p.106549, Article 106549
• Main Authors: Zou, Qiang, Ai, Xinchen, Xue, Tao
• Format: Article
• Language: English
• Subjects: Integrated circuit; Label-free; Phytic acid; SERS; Tollens' reagent
• ISSN: 0026-265X; 1095-9149
• DOI: 10.1016/j.microc.2021.106549

A fast, environment-friendly and label-free Raman probe was synthesized to detect Fe3+ ions in integrated circuit cleaning solution waste. [Display omitted] •A fast, environment-friendly and label-free Raman probe was successfully synthesized.•For Fe3+ ions, the detection limit is low and the linear range is wide.•Good reproducibility and stability for integrated circuit cleaning waste detection are achieved. In this work, an environment-friendly and label-free SERS probe was synthesized through Tollens' reagent and phytic acid to detect Fe3+ ions in the integrated circuit cleaning solution waste. The synthesis process was greatly shortened to 30 min compared with the traditional synthesis time of 6 h. In addition, this SERS probe can be directly used and avoid the environmental pollution caused by the further modification in the synthesis process. This probe has a high sensitivity (LOD = 0.1 μmol L−1) and a wide detection range from 0.5 μmol L−1 to 500 μmol L−1.As a practical application, it has been successfully applied to detect Fe3+ ions in the standard clean two solution (SC-2). This method provides a feasible detection way for whether integrated circuit cleaning solution waste meets the emission criteria.