Investigating the degradation mechanisms of moisture on the reliability of integrated low-k stack

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Bibliographic Details
Published in:Microelectronics and reliability 2023-11, Vol.150, p.115087, Article 115087
Main Authors: Mischler, Léo, Cartailler, Vivien, Imbert, Grégory, Duchamp, Geneviève, Frémont, Hélène
Format: Article
Language:English
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ISSN:0026-2714
DOI:10.1016/j.microrel.2023.115087