Composition and optical property controlled in In 2 O 3 /W 2 N nanostructure composites by nitrogen plasma assisted in-situ thermal annealing

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Bibliographic Details
Published in:Materials science in semiconductor processing 2017-09, Vol.68, p.6-14
Main Authors: Saroni, Azianty, Alizadeh, Mahdi, Rahman, Saadah Abdul, Dee, Chang Fu, Goh, Boon Tong
Format: Article
Language:English
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ISSN:1369-8001
DOI:10.1016/j.mssp.2017.05.030