Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance...

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Bibliographic Details
Published in:Materials science in semiconductor processing 2023-05, Vol.158, p.107343, Article 107343
Main Authors: Chien, Ya-Ting, Tu, Hong-Yi, Chen, Wen-Chung, Zheng, Yu-Zhe, Chou, Sheng-Yao, Sun, Pei-Jun, Tsai, Xin-Ying, Chang, Liu-Wen, Chou, Ming-Chi, Tsai, Tsung-Ming
Format: Article
Language:English
Subjects:
Deep-ultraviolet sensor
Defect passivation
SCCO2
Supercritical fluid
Zn0.5Mg0.5O
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Summary:Supercritical carbon dioxide (SCCO2) fluids technology is utilized to improve the performance of Zn0.5Mg0.5O deep-ultraviolet (DUV) sensor with metal–semiconductor-metal (MSM) structure in this study. The sensitivity of the device can be enhanced double after SCCO2 fluids treatment. The performance improvement is attributed to the passivation of the interface and the bulk defects resulting from device fabrication process. Based on the material analysis, the oxygen vacancies are reduced after SCCO2 fluids treatment, which demonstrates these defects can be passivated. This study proposes a potential technology for SCCO2 fluids to improve the performance of MSM-type Zn0.5Mg0.5O DUV sensor at low temperatures.
ISSN:1369-8001
1873-4081
DOI:10.1016/j.mssp.2023.107343