AlGaN-based metal–semiconductor–metal photodiodes fabricated with nonplanar structure geometry for ultraviolet light detection

Based upon GaN-on-Si wafers with a Al0.24Ga0.76N/AlN/GaN heterostructure, metal–semiconductor–metal photodetectors (MSM PDs) with nonplanar structure geometry are proposed for ultraviolet (UV) light detection. Although the presence of a highly conductive two-dimensional electron gas (2DEG) channel i...

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Bibliographic Details
Published in:Materials science in semiconductor processing 2023-06, Vol.160, p.107426, Article 107426
Main Authors: Tsai, Chia-Lung, Wang, Tong-Wen, Manjunatha, S.N., Sharma, Mukta, Das, Atanu, Chen, Chia-Wei, Zhang, Jin-Rong, Chen, Yi-Shian, Ko, Sun-Chien
Format: Article
Language:English
Subjects:
AlGaN
HEMT
MSM photodiode
Nonplanar structure geometry
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Summary:Based upon GaN-on-Si wafers with a Al0.24Ga0.76N/AlN/GaN heterostructure, metal–semiconductor–metal photodetectors (MSM PDs) with nonplanar structure geometry are proposed for ultraviolet (UV) light detection. Although the presence of a highly conductive two-dimensional electron gas (2DEG) channel in the Al0.24Ga0.76N/AlN/GaN heterostructure is beneficial for realizing a high-electron-mobility transistor with a drain current of 600 mA/mm and a transconductance of 96 mS/mm, a high dark current is also observed in Schottky-barrier based MSM PDs. Using the nonplanar structure design for the MSM PDs (i.e., one Schottky contact formed on the top surface of the AlGaN mesa while the other is on the GaN buffer) achieves a significant decrease in PD’s dark current (
ISSN:1369-8001
1873-4081
DOI:10.1016/j.mssp.2023.107426