Nanoscopic analysis of rapid thermal annealing effects on InGaN grown over Si(111)

• Published in: Materials science in semiconductor processing 2024-12, Vol.184, p.108831, Article 108831
• Main Authors: Martínez-Revuelta, Rubén, Hernández-Gutiérrez, Carlos A., Escobosa-Echavarría, A., Vargas Carosi, Beatriz, Peiró, Francesca, López-López, Máximo
• Format: Article
• Language: English
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2024.108831

This study explores the impact of rapid thermal annealing (RTA) on InxGa1-xN grown over Si(111) by molecular beam epitaxy (MBE). Through X-ray diffraction (XRD) and reciprocal space map (RSM) characterization, notable shifts in diffraction peaks were observed post-annealing, suggesting alterations of the Indium content in the nanostructures. Morphological assessments using scanning electron microscopy (SEM) and atomic force microscopy (AFM) indicated that RTA could smooth the surface of the samples, though some instances of degradation were also noted. Energy-dispersive X-ray spectroscopy (EDS) showed further stoichiometric modification following annealing. Photoluminescence spectroscopy (PL) revealed notable shifts and increases in the intensity of the InxGa1-xN peaks, indicating the formation of regions with high Indium or Gallium concentration. The presence of these enriched regions was particularly evident from the peaks at around 540 nm and 433 nm, suggesting significant changes in the material's composition. Transmission electron microscopy combined with electron energy loss spectroscopy (TEM-EELS) corroborated the presence of In-rich and Ga-rich areas, affirming the phenomenon of Indium surface segregation. So, this study contributes to understanding the behavior of InxGa1-xN nanostructures under rapid thermal annealing, providing insights for advanced optoelectronic applications.