Performance-enhanced triboelectric nanogenerator enabled by wafer-scale nanogrates of multistep pattern downscaling

Herein, we report a triboelectric nanogenerator (TENG) with improved performance using extremely-long sub-50nm grating patterns with high aspect ratio (4,000,000:1) fabricated by the multistep pattern downscaling (MS-PaD) method, which is advantageous in terms of fast throughput, high resolution, co...

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Bibliographic Details
Published in:Nano energy 2017-05, Vol.35, p.415-423
Main Authors: Wang, Hee Seung, Jeong, Chang Kyu, Seo, Min-Ho, Joe, Daniel J., Han, Jae Hyun, Yoon, Jun-Bo, Lee, Keon Jae
Format: Article
Language:English
Subjects:
Electrode conducting effect
Nanopattern flattening
Sub-50 nm grating
Triboelectric nanogenerator
Wafer-scale
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Summary:Herein, we report a triboelectric nanogenerator (TENG) with improved performance using extremely-long sub-50nm grating patterns with high aspect ratio (4,000,000:1) fabricated by the multistep pattern downscaling (MS-PaD) method, which is advantageous in terms of fast throughput, high resolution, cost-effectiveness, industrial compatibility, and large-area scalability in nanofabrication. The intensely-arrayed nanograting pattern is replicated to the flexible substrate on the 8-in. wafer-scale without any defects for the nanograting-assisted TENG (NGTENG). As the well-aligned nanoscale morphology in sub-50nm grating leads to efficient triboelectric charges, the NGTENG shows an outstanding performance enhancement by a factor of 200 compared to non-patterned surface during repetitive contact electrification. To demonstrate capability of self-powered electronics, the output power from the NGTENG is directly used for charging a commercial capacitor and turning on the LEDs. In addition, theoretical study of triboelectric signals according to nanoscale-tuned metal electrodes were investigated to improve the effective output and robustness of triboelectric device. [Display omitted] •Performance-enhanced TENG was demonstrated via 8-in. wafer-scale sub-50nm grating by the multistep pattern downscaling.•Well-aligned and size-tunable nanograting for TENG enhanced power by a factor of 200 compared to the non-patterned.•Investigation of output signal according to nanoscale-tuned surface were studied to improve performance and stability.
ISSN:2211-2855
DOI:10.1016/j.nanoen.2017.04.012