Computation and inversion of ion spectra for neutron depth profiling of curved surfaces

Neutron depth profiling (NDP) is a nondestructive technique for determining the concentration of special isotopes within several microns of a sample's surface. Previous NDP analyses, however, have been restricted to samples with plane surfaces. Here samples with curved surfaces are considered....

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2004-07, Vol.526 (3), p.359-375
Main Author: Shultis, J.Kenneth
Format: Article
Language:English
Subjects:
Deconvolution
Inversion of spectrum
Ion energy spectrum
Neutron depth profiling
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Summary:Neutron depth profiling (NDP) is a nondestructive technique for determining the concentration of special isotopes within several microns of a sample's surface. Previous NDP analyses, however, have been restricted to samples with plane surfaces. Here samples with curved surfaces are considered. In particular, a method for estimating the energy spectrum of ions emitted from curved surfaces is presented. Also, a robust method for inverting the NDP ion energy spectra is presented that yields accurate concentration profiles for both under- and overdetermined NDP spectra.
ISSN:0168-9002
1872-9576
DOI:10.1016/j.nima.2004.02.028