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Normal metal–insulator–superconductor junction technology for bolometers
Normal metal–insulator–superconductor tunnel junctions are candidates for large-format arrays of ultra-low noise equivalent power bolometers. Using a wafer scale process we have fabricated devices with the required sub μ m 3 volumes and ohmic superconductor–normal metal contacts for delivering power...
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Published in: | Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2006-04, Vol.559 (2), p.516-518 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Normal metal–insulator–superconductor tunnel junctions are candidates for large-format arrays of ultra-low noise equivalent power bolometers. Using a wafer scale process we have fabricated devices with the required sub
μ
m
3
volumes and ohmic superconductor–normal metal contacts for delivering power loads. Additionally, we demonstrate simultaneous tunnel junction thermometry and SQUID-based Johnson current noise thermometry. |
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ISSN: | 0168-9002 1872-9576 |
DOI: | 10.1016/j.nima.2005.12.043 |