Development of three-dimensional medium-energy ion scattering using a large solid angle detector

Three-dimensional medium-energy ion scattering (3D-MEIS) equipped with a large detector has been developed for crystallographic structural and elemental analysis of materials. Backscattering experiments have been made for a Si(001) sample at the geometry that the range of the scattering angle is as...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2006-08, Vol.249 (1-2), p.266-269
Main Author: Kobayashi, Takane
Format: Article
Language:English
Subjects:
Blocking
Medium-energy ion scattering
Position-sensitive and time-resolving detector
Structure analysis
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Summary:Three-dimensional medium-energy ion scattering (3D-MEIS) equipped with a large detector has been developed for crystallographic structural and elemental analysis of materials. Backscattering experiments have been made for a Si(001) sample at the geometry that the range of the scattering angle is as large as ±17.5°. Clear blocking shadows were observed together with belt-like shadow aggregations. A low yield spot not relevant to a blocking cone appears, but it can be excluded from the blocking pattern by changing the detection geometry. The results indicate that 3D-MEIS using a large solid angle detector is promising for crystallographic material analysis.
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2006.04.066