Energy loss of protons in SrTiO3 studied by medium energy ion scattering

The energy loss of medium energy protons (55–170keV/amu) was studied for a thin SrTiO3 film on Si. The thickness of the film and the structure of the SrTiO3/Si interface was determined by the combination of X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS) and medi...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2012-10, Vol.288, p.60-65
Main Authors: Dedyulin, S.N., Singh, M.P., Razavi, F.S., Goncharova, L.V.
Format: Article
Language:English
Subjects:
Interface
Medium energy ion scattering
Stopping power
Strontium titanate
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Summary:The energy loss of medium energy protons (55–170keV/amu) was studied for a thin SrTiO3 film on Si. The thickness of the film and the structure of the SrTiO3/Si interface was determined by the combination of X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectrometry (RBS) and medium energy ion scattering (MEIS). These film parameters, together with energy losses extracted from MEIS spectra, were used to calculate stopping cross sections of SrTiO3 by an iterative procedure. In comparison with Andersen and Ziegler values, the data are systematically lower over the whole energy range.
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2012.07.027