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Elemental mapping of large samples by external ion beam analysis with sub-millimeter resolution and its applications
•Large area elemental mapping.•Self-focusing system based on machine vision.•Data analysis using machine learning.•Material analysis using multiple techniques. The elemental mapping of large areas using ion beam techniques is a desired capability for several scientific communities, involved on topic...
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Published in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2018-05, Vol.422, p.68-77 |
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Main Authors: | , , , , , , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | •Large area elemental mapping.•Self-focusing system based on machine vision.•Data analysis using machine learning.•Material analysis using multiple techniques.
The elemental mapping of large areas using ion beam techniques is a desired capability for several scientific communities, involved on topics ranging from geoscience to cultural heritage. Usually, the constraints for large-area mapping are not met in setups employing micro- and nano-probes implemented all over the world. A novel setup for mapping large sized samples in an external beam was recently built at the University of São Paulo employing a broad MeV-proton probe with sub-millimeter dimension, coupled to a high-precision large range XYZ robotic stage (60 cm range in all axis and precision of 5 μm ensured by optical sensors). An important issue on large area mapping is how to deal with the irregularities of the sample’s surface, that may introduce artifacts in the images due to the variation of the measuring conditions. In our setup, we implemented an automatic system based on machine vision to correct the position of the sample to compensate for its surface irregularities. As an additional benefit, a 3D digital reconstruction of the scanned surface can also be obtained. Using this new and unique setup, we have produced large-area elemental maps of ceramics, stones, fossils, and other sort of samples. |
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ISSN: | 0168-583X 1872-9584 |
DOI: | 10.1016/j.nimb.2018.03.006 |