Non-polar ZnO facet implanted with Au ions and subsequently modified using energetic O ion irradiation

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2020-01, Vol.462, p.16-23
• Main Authors: Jagerová, A., Malinský, P., Cutroneo, M., Nekvindová, P., Cajzl, J., Michalcová, A., Macková, A.
• Format: Article
• Language: English
• Subjects: Au nanoparticles; Rutherford Backscattering spectrometry in channelling mode; Swift heavy ion irradiation; ZnO:Au nanocomposites
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/j.nimb.2019.09.030

The possible precipitation or dispersion of Au was followed in non-polar ZnO (10-10) implanted with Au+ 1 MeV ions at the ion fluence 1.5 × 1016 cm−2 and subsequent annealing at 600 °C for 1 h in ambient atmosphere. Afterward irradiation using O3+ 10 MeV ions with fluence 5 × 1014 cm−2 was used to modify Au distribution and internal morphology as well as the structure modification of ZnO host matrix. Rutherford Backscattering Spectrometry (RBS) in channelling mode (RBS-C) and Raman spectroscopy show that the subsequent O irradiation with high electronic energy transfer slightly decreased Zn sub-lattice disorder in m-plane ZnO and increased significantly O sub-lattice disorder. Optical absorbance in the wavelengths ranging from 350 to 700 nm shows the increasing absorbance mainly between 450 and 500 nm and progressive shift of absorbance edge to the higher wavelengths after Au implantation and oxygen irradiation. The distinct absorbance curves appeared in the case where polarized light were used at angles 0° and 90° in oxygen irradiated ZnO:Au samples indicating Au dispersion modification. Transmission Electron Microscopy (TEM) with Energy Dispersive Spectroscopy (EDS) observed Au cluster morphology and an elemental composition showing Au rich clusters of the sizes 10–20 nm in the as-implanted and as-annealed samples containing probably ZnO nanocrystallites.