Fabrication of blazed gratings by area-coded effective medium structures

Area-coded effective medium structures (ACES) are a recently presented novel type of diffractive structure. Because of their higher stability compared to 2D binary blazed gratings, they have the potential of a broader use in micro-optics applications. The first fabrication with electron-beam lithogr...

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Bibliographic Details
Published in:Optics communications 2006-10, Vol.266 (2), p.697-703
Main Authors: Elfström, Henna, Kuittinen, Markku, Vallius, Tuomas, Kleemann, Bernd H., Ruoff, Johannes, Arnold, Ralf
Format: Article
Language:English
Subjects:
ACES
Binary blazed grating
BLACES
Blazed area-coded effective medium structures
Diffraction grating
Diffractive optics
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Gratings
Optical elements, devices, and systems
Optics
Physics
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Summary:Area-coded effective medium structures (ACES) are a recently presented novel type of diffractive structure. Because of their higher stability compared to 2D binary blazed gratings, they have the potential of a broader use in micro-optics applications. The first fabrication with electron-beam lithography validate the theoretical model of blazed ACES. The measured diffraction efficiencies are in very good agreement with the values obtained from rigorous electromagnetic analysis.
ISSN:0030-4018
1873-0310
DOI:10.1016/j.optcom.2006.05.042