Full-field chromatic confocal microscopy for surface profilometry with sub-micrometer accuracy

• Published in: Optics and lasers in engineering 2023-02, Vol.161, p.107384, Article 107384
• Main Authors: Chen, Hong-Ruei, Chen, Liang-Chia
• Format: Article
• Language: English
• Subjects: Automated optical inspection (AOI); Chromatic confocal microscopy; Galvanometer-scan; Optical aberration; Surface profilometry
• ISSN: 0143-8166; 1873-0302
• DOI: 10.1016/j.optlaseng.2022.107384

•A new chromatic confocal microscopy for full-field surface profilometry.•The method can achieve surface profilometry with sub-micrometer accuracy.•The development is vital to semiconductor manufacturing and inline AOI. In various manufacturing processes like semiconductor fabrication, highly accurate and efficient surface profilometry on microstructures is critically demanded. This article presents a quasi-area-scan chromatic confocal microscopy for full-field surface profilometry with high precision and accuracy for in-line automated optical inspection (AOI). Unlike conventional confocal microscopy, the proposed opto-mechatronic confocal measuring system does not require mechanical scanning of the test object. Moreover, it is bi-telecentric to satisfy full-field measurement without optical aberration. Optical line-scan illumination and imaging modules are integrated with an electrically driven galvanometer to perform line scanning. Most importantly, the proposed system is superior to traditional chromatic confocal scanning in that positioning uncertainties can be avoided, and high-speed detection with a large field of view and high accuracy can be achieved. Pre-calibrated step-height gauges were experimentally measured to verify the precision and accuracy of the developed probe. Results showed measurement bias kept below 0.239 µm with a standard deviation of 0.126 µm. When the Galvanometer reaches its design specifications, the measuring speed of the system can exceed 8000 lines/s.