Investigation of biaxial stresses in diamond films deposited on a silicon substrate by the HF CVD method

The results of investigations into on composition and biaxial stress in polycrystalline diamond films deposited on silicon substrates are presented. The diamond films’ characteristics were carried out using Raman spectroscopy and Electron back-scattered diffraction. The results indicate that, apart...

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Bibliographic Details
Published in:Optical materials 2008-01, Vol.30 (5), p.770-773
Main Authors: Bąk, G.W., Fabisiak, K., Klimek, L., Kozanecki, M., Staryga, E.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Diamond films
Electron back-scattered diffraction
Exact sciences and technology
Fullerenes and related materials
diamonds, graphite
Materials science
Physics
Raman spectroscopy
Specific materials
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Summary:The results of investigations into on composition and biaxial stress in polycrystalline diamond films deposited on silicon substrates are presented. The diamond films’ characteristics were carried out using Raman spectroscopy and Electron back-scattered diffraction. The results indicate that, apart from the dominating crystalline diamond phase inside the grains, an amount of disordered phase exists among the grains. No evidence of such diamond polymorphs as lonsdalite and graphite has been detected in the investigated films.
ISSN:0925-3467
1873-1252
DOI:10.1016/j.optmat.2007.02.034