Design of composition, structure and optical properties of AsxSe100-x (15<x<96) films by plasma-enhanced chemical vapor deposition

We have demonstrated for the first time synthesis of amorphous As–Se films within a large compositional range (AsxSe100-x (15 

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Bibliographic Details
Published in:Optical materials 2019-08, Vol.94, p.166-171
Main Authors: Nezdanov, Aleksey, Usanov, Dmitry, Kudryashov, Mikhail, Markelov, Aleksey, Trushin, Vladimir, De Filpo, Giovanni, Mashin, Aleksandr
Format: Article
Language:English
Subjects:
Chalcogenide films
Composition design
Optical properties
PECVD method
Plasma impact
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Description
Summary:We have demonstrated for the first time synthesis of amorphous As–Se films within a large compositional range (AsxSe100-x (15 
ISSN:0925-3467
1873-1252
DOI:10.1016/j.optmat.2019.05.027