A Novel Atomic Force Microscope Control System Based on PC104 and DSP Embedded System

In order to achieve large scanning range, this article presents a new type high-speed AFM system. According to the need of rapid data transmission and operation, the AFM control system structure was composed of PC104 and DSP hardware model. Because of using a large displacement flexure stage as the...

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Bibliographic Details
Published in:Physics procedia 2012, Vol.33, p.1497-1501
Main Authors: Yin, Bohua, Chen, Daixie, Lin, Yunsheng, Chu, Mingzhang, Han, Li
Format: Article
Language:English
Subjects:
AFM
DSP
High speed scanning
PC104
Sinusoidal wave
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Summary:In order to achieve large scanning range, this article presents a new type high-speed AFM system. According to the need of rapid data transmission and operation, the AFM control system structure was composed of PC104 and DSP hardware model. Because of using a large displacement flexure stage as the sample stage, this AFM system is capable of providing a scan range of 100×100um image with 50Hz line-scan speed. The capacitor displacement sensors are used as x-y position during AFM scan image. We realized a new scanning method based on positioning control. The scanning images are more precision and less distortion than general open-loop x-y scanning image.
ISSN:1875-3892
1875-3892
DOI:10.1016/j.phpro.2012.05.244