Development of the Automatic Modeling System for Reaction Mechanisms Using REX+JGG

The identification of appropriate reaction models is very helpful for developing chemical vapor deposition (CVD) processes. In this study, we developed an automatic modeling system that analyzes experimental data on the cross- sectional shapes of films deposited on substrates with nanometer- or micr...

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Bibliographic Details
Published in:Physics procedia 2013, Vol.46, p.239-247
Main Authors: Takahashi, Takahiro, Kawai, Kohei, Nakai, Hiroyuki, Ema, Yoshinori
Format: Article
Language:English
Subjects:
Automatic Modeling
Chemical Vapor Deposition
Genetic Algorithms
Reaction Mechanism
Real-Coded Genetic Algorithms
Simulation
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Summary:The identification of appropriate reaction models is very helpful for developing chemical vapor deposition (CVD) processes. In this study, we developed an automatic modeling system that analyzes experimental data on the cross- sectional shapes of films deposited on substrates with nanometer- or micrometer-sized trenches. The system then identifies a suitable reaction model to describe the film deposition. The inference engine used by the system to model the reaction mechanism was designed using real-coded genetic algorithms (RCGAs): a generation alternation model named “just generation gap” (JGG) and a real-coded crossover named “real-coded ensemble crossover” (REX). We studied the effect of REX+JGG on the system's performance, and found that the system with REX+JGG was the most accurate and reliable at model identification among the algorithms that we studied.
ISSN:1875-3892
1875-3892
DOI:10.1016/j.phpro.2013.07.060