Gas Flow Sputtered Thick Layers of Columnar Lead Zirconate Titanate on Silicon Wafers for High Frequency Ultrasound Transducers

The piezoelectric ceramic PZT, lead zirconate titanate, is the most spread material to generate ultrasound in medical and technical applications. Thereby frequencies between 30MHz and 100MHz require ceramic thicknesses between 50μm and 20μm. The presented gas flow sputtering process permits to depos...

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Bibliographic Details
Main Authors: Tiefensee, F., Kaden, D., Jakob, A., Quenzer, H.J., Jung, Th
Format: Conference Proceeding
Language:English
Subjects:
gas flow sputtering
high frequency ultrasound
micro actuator
micro structuring
PZT
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Description
Summary:The piezoelectric ceramic PZT, lead zirconate titanate, is the most spread material to generate ultrasound in medical and technical applications. Thereby frequencies between 30MHz and 100MHz require ceramic thicknesses between 50μm and 20μm. The presented gas flow sputtering process permits to deposit PZT of this thickness with a sputtering rate of 100nm/min at temperatures between 520°C and 550°C. The PZT shows a typical columnar structure with a piezoelectric coefficient d33f of about 500 pm/V. An example for the fabrication ultrasound arrays with this sputtering process and lithographic structuring is given.
ISSN:1875-3892
1875-3892
DOI:10.1016/j.phpro.2015.08.199