Fabrication of MEMS Platform for Sensors Applications by Laser Micro Engraving

The target of this work is the demonstration of advanced approaches able to provide rapid prototyping by using laser technology ceramic MEMS platforms for chemical sensor operating under harsh environmental conditions and, on the other hand, to assure microhotplate stable at high temperature, which...

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Bibliographic Details
Published in:Physics procedia 2015, Vol.72, p.475-479
Main Authors: Oblov, Konstantin, Ivanova, Anastasia, Soloviev, Sergey, Samotaev, Nikolay, Vasiliev, Alexey, Sokolov, Andrey
Format: Article
Language:English
Subjects:
gas sensor
laser
MEMS
microhotplate
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Summary:The target of this work is the demonstration of advanced approaches able to provide rapid prototyping by using laser technology ceramic MEMS platforms for chemical sensor operating under harsh environmental conditions and, on the other hand, to assure microhotplate stable at high temperature, which can be used for the deposition of high working temperature gas sensing materials, for example, oxides of tin, gallium, zirconium and hafnium. As substrate ceramic material in work using alumina oxide
ISSN:1875-3892
1875-3892
DOI:10.1016/j.phpro.2015.09.013