An Inverse Method of Manufacturing a Structured X-ray Screen

It is shown that the spatial resolution of an X-ray screen can be increased by forming pore–like matrix filled with phosphor. It is revealed that the smaller is the diameter of the pore, the higher spatial resolution can be achieved. However, there is a problem of filling the narrow pores. In the pr...

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Bibliographic Details
Main Authors: Nazmov, Vladimir, Goldenberg, Boris, Lemzyakov, Alexey
Format: Conference Proceeding
Language:English
Subjects:
microstructure
X-ray lithography
X-ray screen
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Summary:It is shown that the spatial resolution of an X-ray screen can be increased by forming pore–like matrix filled with phosphor. It is revealed that the smaller is the diameter of the pore, the higher spatial resolution can be achieved. However, there is a problem of filling the narrow pores. In the proposed method, phosphor was mixed with a structured material, the resist SU-8, and the patterning was carried out, using synchrotron radiation of the VEPP-3 synchrotron source. Thus, the need of filling pores with phosphor disappears. Due to the deep penetration of hard X-rays into the materials during the patterning step, in spite of heavy elements inside Gd2O2S used as a phosphor, the height of patterned microstructures can be as large as tens or hundreds of micrometers. The optical isolation of the patterned phosphor pillars is carried out by electroplating of nickel between the pillars.
ISSN:1875-3892
1875-3892
DOI:10.1016/j.phpro.2016.11.034