X-ray photoelectron spectroscopy investigations of Si in non-stoichiometric SiNx LPCVD multilayered coatings

Saved in:
Bibliographic Details
Published in:Physica. E, Low-dimensional systems & nanostructures Low-dimensional systems & nanostructures, 2007-04, Vol.38 (1-2), p.156-159
Main Authors: Wainstein, D.L., Kovalev, A.I., Ducso, Cs, Jaszi, T., Basa, P., Horvath, Zs.J., Lohner, T., Petrik, P.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:1386-9477
DOI:10.1016/j.physe.2006.12.039