Volatile asymmetric fluorinated (O^N)-chelated palladium complexes: From ligand sources to MOCVD application

• Published in: Polyhedron 2019-10, Vol.171, p.455-463
• Main Authors: Nikolaeva, N.S., Kuratieva, N.V., Vikulova, E.S., Stabnikov, P.A., Morozova, N.B.
• Format: Article
• Language: English
• Subjects: Beta-ketoiminates; MOCVD; Palladium volatile precursors; Single crystal X-ray diffraction analysis; Thermal properties
• ISSN: 0277-5387
• DOI: 10.1016/j.poly.2019.07.039

Effect of a substituent at the donor nitrogen atom in asymmetric palladium β-ketoiminate-type complexes, dealing with 1,1,1-trifluoroacetonate derivatives on the structure and thermal properties has been investigated. Volatile (O^N)-coordinated Pd(II) complexes presented could be used as effective precursors for deposition of palladium thin films by chemical vapor deposition. [Display omitted] The work deals with the volatile asymmetric palladium complexes of β-ketoiminate-type as a new direction to design the effective partially fluorinated (O^N)-chelated precursors for metal–organic chemical vapor deposition (MOCVD). To determine the effect of the substituent on the donor nitrogen atom, [Pd(CF3COCHCN(R)CH3)2]2 complexes with R = CH3 (Mei-tfac) and N(CH3)2 (dmht) were synthesized and characterized by elemental analysis, IR and NMR spectroscopy. The molecular and crystal structures of the complexes as well as the initial ligand sources HMei-tfac and Hdmht were determined by single-crystal XRD. The obtained a new crystallographic and thermal (TG/DTA) information combined with the crystal lattice energy calculations allowed to reveal the features of the N-substituted fluorinated complexes in comparison with their non-fluorinated analogs. The possibility of using the proposed compounds as MOCVD precursors was experimentally confirmed.