Photocatalysis assisting the mechanical polishing of a single-crystal SiC wafer utilizing an anatase TiO 2 -coated diamond abrasive

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Bibliographic Details
Published in:Precision engineering 2017-07, Vol.49, p.235-242
Main Authors: Lu, Jing, Wang, Yaguang, Luo, Qiufa, Xu, Xipeng
Format: Article
Language:eng ; jpn
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ISSN:0141-6359
DOI:10.1016/j.precisioneng.2017.02.011