PLD-grown WO3 nanostructures with ϵ-phase for gas sensor applications

Tungsten trioxide nanostructures, containing WO3 ϵ-phase, were deposited by pulsed laser deposition (PLD) technique on r-plane Al2O3 substrates at room temperature and then annealed at 400 ∘C. Partial oxygen pressure p(O2) was varied from 0.1 mbar to 0.3 mbar. Structural characterization was carried...

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Bibliographic Details
Main Authors: Lappalainen, J., Viter, R., Puustinen, J., Gornostayev, D., Smyntyna, V.
Format: Conference Proceeding
Language:English
Subjects:
[formula omitted]-phase
Gas sensors
Nanostructures
PLD deposition
WO3
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Summary:Tungsten trioxide nanostructures, containing WO3 ϵ-phase, were deposited by pulsed laser deposition (PLD) technique on r-plane Al2O3 substrates at room temperature and then annealed at 400 ∘C. Partial oxygen pressure p(O2) was varied from 0.1 mbar to 0.3 mbar. Structural characterization was carried out using XRD, Raman, and HRSEM measurements. Gas sensitivity responses of nanocrystalline sensors were measured for several gases including H2S, H2, NOx, and CO. It was found that the sensor response was dependent on the phase and microstructure of WO3 films.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2010.09.118