A 3mm endoscopic probe with integrated MEMS micromirror for optical coherence tomography bioimaging

A 3mm diameter endoscopic probe for Optical Coherence Tomography (OCT) has been developed. It consists of a 1 mm diameter micromirror, a silicon optical bench (SiOB), a gradient refractive index (GRIN) lens and a single mode optical fiber. The optical probe is enclosed within a biocompatible, transp...

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Bibliographic Details
Published in:Procedia engineering 2010, Vol.5, p.681-684
Main Authors: Mu, X.J., Zhou, G.Y., Feng, H.H., Xu, Y.S., Yu, A.B., Tan, C.W., Chen, K.W.S., Xie, J., Chau, F.S.
Format: Article
Language:English
Subjects:
Micromirror
OCT probe
SiOB
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Summary:A 3mm diameter endoscopic probe for Optical Coherence Tomography (OCT) has been developed. It consists of a 1 mm diameter micromirror, a silicon optical bench (SiOB), a gradient refractive index (GRIN) lens and a single mode optical fiber. The optical probe is enclosed within a biocompatible, transparent and waterproof polycarbonate tube for in vivo diagnostic applications. The two-axis scanning micromirror is driven by electrothermal actuators with a voltage less than 2 V for a mechanical deflection of up to 11∘. By integrating the MEMS micromirror with a commercial Optical Coherence Tomography system and miniaturized probe, high resolution 2-D/3-D in vivo and in situ images and excellent optical sectioning for imaging multilayer microstructures of internal organs can be realized. The capability of the system is demonstrated by obtaining a 2-D image of an onion.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2010.09.201