Spatially resolved measurement of magnetic flux density using a 32×32 CMOS-integrated hall sensor array

This paper reports on a novel application for an array of 32×32 field-effect transistors (FETs) each equipped with four source/drain contact. When the FETs are operated as Hall sensors, the array can be used in a high-precision, three-dimensional micro-positioning device by resolving the spatial dis...

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Bibliographic Details
Published in:Procedia engineering 2010, Vol.5, p.981-984
Main Authors: Stephan, J.M., Gieschke, P., Paul, O., Ruther, P.
Format: Article
Language:English
Subjects:
Hall sensor array
Magnetic field
Micro positioning
Spatial resolution
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Summary:This paper reports on a novel application for an array of 32×32 field-effect transistors (FETs) each equipped with four source/drain contact. When the FETs are operated as Hall sensors, the array can be used in a high-precision, three-dimensional micro-positioning device by resolving the spatial distribution of magnetic flux densities. Lateral and out-of-plane resolutions (2σ) of 3.6μm and 16μm, respectively, were achieved. More generally, the presented method is perfectly suitable for other applications such as the experimental investigation of the performance of miniaturized magnetic concentrators and, more generally, whenever the spatial distribution of magnetic fields is of interest.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2010.09.273