Squeeze-film damper design with air channels: Experimental verification

The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well a...

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Bibliographic Details
Main Authors: Dias, Rosana A., Wolffenbuttel, Reinoud F., Cretu, Edmond, Rocha, Luis A.
Format: Conference Proceeding
Language:English
Subjects:
air channels
MEMS capacitive sensing
Squeeze-film damping
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Summary:The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2011.12.012