Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices

Wireless surface acoustic wave devices based on langasite allow sensor operation in high-temperature environments. While langasite shows piezoelectric behavior up to temperatures close to its melting point of 1470°C, the stability of thin film electrodes for excitation of acoustic waves limits the a...

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Bibliographic Details
Published in:Procedia engineering 2011, Vol.25, p.168-171
Main Authors: Richter, D., Sakharov, S., Forsén, E., Mayer, E., Reindl, L., Fritze, H.
Format: Article
Language:English
Subjects:
electrode materials
High-temperature
langasite
surface acoustic wave
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Summary:Wireless surface acoustic wave devices based on langasite allow sensor operation in high-temperature environments. While langasite shows piezoelectric behavior up to temperatures close to its melting point of 1470°C, the stability of thin film electrodes for excitation of acoustic waves limits the application tem- perature. Different metal and ceramic based thin films are tested regarding their applicability as electrode materials for wireless surface acoustic wave devices at temperatures above 600°C. The devices should with- stand temperatures of 800°C for at least several hours. The high-temperature stability of platinum, platinum- rhodium, iridium as well as lanthanum strontium manganite (LSM) based electrodes is characterized using electrical measurements, x-ray diffraction (XRD) measurements and scanning electron microscopy (SEM) imaging. SAW devices with Ti/Pt thin film electrodes are operated up to temperatures of 800°C. LSM/Pt films exhibit a good stability up to temperatures of 800°C. Above 600°C its resistance is comparable to platinum films
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2011.12.042