AlN-based piezoelectric micropower generator for low ambient vibration energy harvesting

In this paper a resonant micropower generator based on the transverse piezoelectric effect is presented. The generator consists of a large silicon mass attached to an polysilicon cantilever covered with an AlN thinfilm as piezoelectric material. To maximize the power density of the generator, a para...

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Bibliographic Details
Published in:Procedia engineering 2011, Vol.25, p.721-724
Main Authors: Stoppel, F., Schröder, C., Senger, F., Wagner, B., Benecke, W.
Format: Article
Language:English
Subjects:
AlN
Energy
Generator
Havesting
Micropower
Piezoelectric
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Summary:In this paper a resonant micropower generator based on the transverse piezoelectric effect is presented. The generator consists of a large silicon mass attached to an polysilicon cantilever covered with an AlN thinfilm as piezoelectric material. To maximize the power density of the generator, a parametric study by means of analytical modeling and FEM simulation has been performed. Different optimized generators with resonance frequencies in the range from 100Hz up to 1kHz have been designed and fabricated, using dedicated MEMS technology processes. First unpackaged prototypes showed a quality factor of about 500 under atmospheric pressure and were able to generate an electrical output power of up to 1.9μW at an external acceleration of 1.6 m/s2.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2011.12.178