Oscillator-Based Volatile Detection System Using Doubly- Clamped Micromechanical Resonators

In this paper, we demonstrate a functionalized and resonant piezo-actuated volatile sensor which is interfaced by electronics for frequency shift detection. Enhanced signal sensing is achieved via the effective feed-through capacitance cancellation scheme. The closed-loop oscillator, realized with o...

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Bibliographic Details
Published in:Procedia engineering 2011, Vol.25, p.1533-1536
Main Authors: Patrascu, M., Pettine, J., Karabacak, D.M., Vandecasteele, M., Brongersma, S.H., Crego-Calama, M.
Format: Article
Language:English
Subjects:
closed-loop oscillator
frequency shift detection
functionalized sensor
gas detection
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Summary:In this paper, we demonstrate a functionalized and resonant piezo-actuated volatile sensor which is interfaced by electronics for frequency shift detection. Enhanced signal sensing is achieved via the effective feed-through capacitance cancellation scheme. The closed-loop oscillator, realized with off-the-shelf components, attains a frequency stability of 2.7Hz for the 1.8MHz resonant mode of the gas sensor. The sensor was exposed to pulses of water and ethanol vapor mixtures, yielding a temporary dip in resonance frequency as well as volatile-specific recovery times.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2011.12.379