Zinc Oxide Nanowires Deposited on Polymeric Hotplates for Low-power Gas Sensors

Zinc oxides (ZnO) nanowires were successfully deposited on plastic low-power micro-hotplates using the thermal oxidation technique. Metallic zinc layer was deposited on the sensing transducer by RF magnetron sputtering and then oxidized in a controlled atmosphere in order to obtain ZnO nanostructure...

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Bibliographic Details
Main Authors: Zappa, D., Briand, D., Comini, E., Courbat, J., de Rooij, N.F., Sberveglieri, G.
Format: Conference Proceeding
Language:English
Subjects:
chemical sensors
Metal oxides
nanowires
polymeric substrate
ZnO
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Summary:Zinc oxides (ZnO) nanowires were successfully deposited on plastic low-power micro-hotplates using the thermal oxidation technique. Metallic zinc layer was deposited on the sensing transducer by RF magnetron sputtering and then oxidized in a controlled atmosphere in order to obtain ZnO nanostructures. Morphological investigations confirmed the nanometric dimensions of the fabricated nanostructures. The n-type behavior of the nanostructured material was evaluated towards different chemical species to highlight the electrical properties of the materials. Calibration curves for the detection of several chemical species were defined.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2012.09.352