Characterization of MEMS Resonators via Feedthrough De-embedding of Pulsed-mode Response

In this paper, we analyze and give experimental evidence of the efficiency of pulsed-mode actuation for the characterization of capacitive MEMS resonators. In particular, we show how to process the output signal in pulsed mode to eliminate parasitic feedthrough effects and characterize the resonator...

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Bibliographic Details
Published in:Procedia engineering 2014-01, Vol.87, p.823-826
Main Authors: Brenes, A., Juillard, J., Santos, F. Vinci Dos, Bonnoit, A.
Format: Article
Language:English
Subjects:
Capacitive feedthrough
MEMS characterization
open-loop excitation
pulsed-mode response
time domain signal processing
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Summary:In this paper, we analyze and give experimental evidence of the efficiency of pulsed-mode actuation for the characterization of capacitive MEMS resonators. In particular, we show how to process the output signal in pulsed mode to eliminate parasitic feedthrough effects and characterize the resonator. We test our approach on a pressure sensor, developed by THALES Avionics, used for avionics applications. Contrary to the existing state-of-the-art techniques, the method described in this paper can be used to characterize an electrostatic MEMS without a spectrum analyzer or high-performance ADC.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2014.11.278