Systematic Investigation of Fluidic Damping in Mechanical Resonators with Dimensions Ranging from Mico- to Nano-Scale

We investigate the pressure dependent fluidic damping in mechanical resonators from room pressure down to 3Pa for a broad variety of designs. Air gaps underneath the suspended parts ranging from micro to nano-scale lead to a wide operating regime from the continuum regime down to the free molecular...

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Bibliographic Details
Published in:Procedia engineering 2014, Vol.87, p.464-467
Main Authors: Manz, J., Wachutka, G., Schrag, G.
Format: Article
Language:English
Subjects:
Fluidic Damping
Low Pressure
Mechanical Resonators
MEMS
NEMS
Q-factor
System Level Modelling
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Summary:We investigate the pressure dependent fluidic damping in mechanical resonators from room pressure down to 3Pa for a broad variety of designs. Air gaps underneath the suspended parts ranging from micro to nano-scale lead to a wide operating regime from the continuum regime down to the free molecular flow regime. Two pposed simulation approaches for modelling the airflow inside the gap are presented and both approaches are compared to measurements of mechanical resonators.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2014.11.389