MEMS Micro-glassblowing Paradigm for Wafer-level Fabrication of Fused Silica Wineglass Gyroscopes

In this paper, we report latest developments in wafer-level micro-glassblowing paradigm for fabrication of highly symmetric, high Q-factor fused silica wineglass gyroscopes. Q-factors over 1 million have been demonstrated on both n = 2 wineglass modes with a high frequency symmetry (Δf/f) of 132ppm....

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Bibliographic Details
Published in:Procedia engineering 2014, Vol.87, p.1489-1492
Main Authors: Senkal, Doruk, Ahamed, Mohammad J., Askari, Sina, Shkel, Andrei M.
Format: Article
Language:English
Subjects:
high-Q resonator
MEMS wineglass gyroscope
micro-glassblowing of fused silica
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Summary:In this paper, we report latest developments in wafer-level micro-glassblowing paradigm for fabrication of highly symmetric, high Q-factor fused silica wineglass gyroscopes. Q-factors over 1 million have been demonstrated on both n = 2 wineglass modes with a high frequency symmetry (Δf/f) of 132ppm. High Q-factor is enabled by a high aspect ratio, self-aligned glassblown stem structure, careful surface treatment of the perimeter area, and low internal loss fused silica material. Low frequency split is provided by the self-correcting behavior of the surface tension based micro-glassblowing process. Micro- glassblowing may enable batch-fabrication of high performance fused silica wineglass gyroscopes on a wafer surface at a significantly lower cost than their precision-machined macro-scale counterparts.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2014.11.580