Bidirectionally Actuated Ohmic Switches Allowing Sequential Dual-contact Operation for Improved Reliability

In this paper ohmic switches allowing sequential switching of multiple contacts to improve the device reliability are proposed. The switches are based on a novel design concept featuring bidirectional operation using both piezoelectric and electrostatic actuation. To enhance the hot switching capabi...

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Bibliographic Details
Main Authors: Stoppel, F., Lisec, T., Wagner, B., Benecke, W.
Format: Conference Proceeding
Language:English
Subjects:
actuator
AlN
bidirectional actuation
contact material
electrostatic
FEM
high force
MEMS
ohmic switch
piezoelectric
PZT
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Summary:In this paper ohmic switches allowing sequential switching of multiple contacts to improve the device reliability are proposed. The switches are based on a novel design concept featuring bidirectional operation using both piezoelectric and electrostatic actuation. To enhance the hot switching capabilities two sequentially operating contact groups are introduced, enabling the protection of the low resistive contact by a more reliable contact. Measurement results of fabricated MEMS switches have proven that reliable sequential switching is achieved independently from the contact gap and actuation mode. Furthermore, the switches feature very low contact resistances of less than 0.3 Ω and are able to overcome contact sticking under hot switching by applying bidirectional actuation.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2015.08.793