Intrinsic Stress Control of Sol-Gel Derived PZT Films for Buckled Diaphragm Structures of Highly Sensitive Ultrasonic Microsensors

Intrinsic stress of sol-gel derived lead-zirconate-titanate (PZT) films has been investigated from the viewpoint of diaphragm buck- ling behavior for highly sensitive structures of piezoelectric ultrasonic microsensors. Since upward-buckled diaphragms of the sensors yield higher sensitivity than fla...

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Bibliographic Details
Published in:Procedia engineering 2015, Vol.120, p.1205-1208
Main Authors: Yamashita, Kaoru, Nishiumi, Taiki, Arai, Kaito, Tanaka, Hikaru, Noda, Minoru
Format: Article
Language:English
Subjects:
buckling
diaphragm
sensitivity
sol-gel PZT
stress
ultrasonic sensor
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Summary:Intrinsic stress of sol-gel derived lead-zirconate-titanate (PZT) films has been investigated from the viewpoint of diaphragm buck- ling behavior for highly sensitive structures of piezoelectric ultrasonic microsensors. Since upward-buckled diaphragms of the sensors yield higher sensitivity than flat or downward ones, a fabrication process which enables the diaphragms to buckle sponta- neously upward was developed owning to intrinsic tensile stress of the PZT films. To control the intrinsic stress as adequate for the upward buckling, calcination temperature in the sol-gel deposition process has been modified in the range from 300∘C to 400∘C. The stress has decreased with increasing the temperature in the range and the 400∘C-calcined PZT films have shown a suitable stress for the buckling deflection and probability of upward buckling for the sensor diaphragms.
ISSN:1877-7058
1877-7058
DOI:10.1016/j.proeng.2015.08.802