Evaluation of Particle Beam Lithography for Fabrication of Metallic Nano-structures

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Bibliographic Details
Published in:Procedia manufacturing 2019, Vol.30, p.261-267
Main Authors: Shahali, Hesam, Hasan, Jafar, Wang, Hongxia, Tesfamichael, Tuquabo, Yan, Cheng, Yarlagadda, Prasad K.D.V.
Format: Article
Language:English
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ISSN:2351-9789
2351-9789
DOI:10.1016/j.promfg.2019.02.038