Making insulating Al2O3 electrically conductive without loss of translucency using a small amount of ITO grain boundary phase

The electrical conductivity of Al2O3 must be improved from 10−16 S/cm to the range between 10−5 and 100 S/cm, when insulating Al2O3 parts are employed for semiconductor manufacturing equipment. To remain the advantages of Al2O3 ceramics, it is necessary to control electrical conductivity using a sma...

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Bibliographic Details
Published in:Scripta materialia 2019-01, Vol.159, p.24-27
Main Authors: Kusunose, Takafumi, Fujita, Asuka, Sekino, Tohru
Format: Article
Language:English
Subjects:
Alumina
Electrical conductivity
Grain boundary phase
Indium tin oxide
Translucent
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Summary:The electrical conductivity of Al2O3 must be improved from 10−16 S/cm to the range between 10−5 and 100 S/cm, when insulating Al2O3 parts are employed for semiconductor manufacturing equipment. To remain the advantages of Al2O3 ceramics, it is necessary to control electrical conductivity using a small amount of conducting phase by sintering in air atmosphere. In this study, electrical conductivity of Al2O3 ceramics was successfully increased from 10−16 to 10−1 S/cm by precipitating a small amount of indium tin oxide (ITO) grain boundary phase, without evident deterioration of translucent of sintered Al2O3 polycrystals. [Display omitted]
ISSN:1359-6462
1872-8456
DOI:10.1016/j.scriptamat.2018.09.009