Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2011-01, Vol.165 (1), p.124-131
Main Authors: Shinohara, Hidetoshi, Mizuno, Jun, Shoji, Shuichi
Format: Article
Language:English
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ISSN:0924-4247
DOI:10.1016/j.sna.2010.04.006