Ultrahigh-sensitivity fiber-tip microcavity ultrasonic sensor based on optomechanical effect

• Published in: Sensors and actuators. A. Physical. 2024-02, Vol.366, p.114932, Article 114932
• Main Authors: Chen, Zongyu, Dong, Bo, Zhang, Senpeng, Yang, Liu, Shao, Qi, Huang, Wobin
• Format: Article
• Language: English
• Subjects: All-polymer; Optomechanical Effect; Ultrasonic sensor
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/j.sna.2023.114932

An ultrahigh-sensitivity fiber-tip cavity ultrasonic sensor based on optomechanical effect fabricated by Two-photon Polymerization (TPP) Technology is presented. The microcavity is based on all-polymer material with the structure of three support columns and two micro-discs, and one micro-disc with one round hole. Experiment results show that the sensor has an ultrahigh sensitivity which is 889 times as big as that of the commercial acoustic sensor. It has a good frequency response within the frequency range of 52.19 KHz-384.6 KHz. The sensor exhibits the inherent advantages of small size, compact structure, easy of fabrication, high sensitivity and wide band acoustic response, and is expected to have application in ultrasonic sensing and imaging. [Display omitted] •It can be manufactured by a TPP Technology with good reproducibility.•Its sensitivity is 889 times that of the commercial ultrasonic sensor at the ultrasonic frequency of 200.3 KHz.•It has good response to ultrasonic within frequency range of 52.19KHz-384.6KHz.•It exhibits the advantages of compact structure, wide band acoustic response and ultrahigh sensitivity.